This GCA stepper was manufactured in 1988.  The ALS system was the 1st of its kind capable of handling 8” wafers.  This G-line stepper was built to last and has many advanced features that are unavailable on older GCA steppers.  This GCA stepper has been refurbished by SCS for improved reliability and includes cleanroom space saving features uniquely designed by SCS.

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Click Here to access a Printable Data Sheet

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