Manufactured in 1991, the Auto-Step was the latest model of a series of GCA steppers that focused on the wafer plane by moving the lense in the Z-axis.

This 7500 GCA stepper  is configured with a Tropel 2955i reduction lens (4x, 29mm, .55na, 365nm)   

The ALS system was the 1st of its kind capable of handling 8” wafers.  This G-line stepper was built to last and has many advanced features that are unavailable on older GCA steppers.  

ALS stepper is fully automated and considered a workhorse by many current users.  Features include a DFAS local alignment system& metrology system designed for improved system matching.

Currently set up for 6" wafers but can be modified to automatically run 3"-8" wafers or modified to accepted wafer pieces or single chips.

Unique Features of this GCA stepper includes a Grumman type cabling system, a user friendly workstation, advanced metrology system for improved alignment and focusing.