These are just a few of our available GCA Steppers and Components. All units are available for delivery and setup.
Manufactured in 1991, the Auto-Step was the latest model of a series of GCA steppers that focused on the wafer plane by moving the lense in the Z-axis.
This 7500 GCA stepper is configured with a Tropel 2955i reduction lens (4x, 29mm, .55na, 365nm)
The ALS system was the 1st of its kind capable of handling 8” wafers. This G-line stepper was built to last and has many advanced features that are unavailable on older GCA steppers.
This sturdy 1988 G-line ALS stepper is fully automated and considered a workhorse by many current users. Features include a DFAS local alignment system& metrology system designed for improved system matching.
Currently set up for 6" wafers but can be modified to automatically run 3"-8" wafers or modified to accepted wafer pieces or single chips.
Unique Features of this GCA stepper includes a Grumman type cabling system, a user friendly workstation, advanced metrology system for improved alignment and focusing.