GCA AutoStep DSW – 1835

This GCA Stepper was manufactured in 1991.  The Auto-Step was the latest model of a series of GCA steppers that focused on the wafer plane by moving the lens in the Z-axis.  Unique Features of this GCA stepper includes a Grumman type cabling system, a user friendly workstation, advanced metrology system for improved alignment and focusing. This GCA stepper is an I-line system with Tropel 2145I high-precision optical reduction lens.

 

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